The SEM-FEG Zeiss SUPRA 40 is equipped with an X-Act Silicon Drift Detector LN2-free with AZtec analysis software provided by Oxford Instruments.
X-Act is a 10 mm2 SDD that can detect elements from Be to Pu with a resolution of 125 eV. The stability is guaranteed from 1.000 to 100.000 cps (resolution change < 1 eV).
AZtecEnergy EDS Software for SEM combines this latest generation of detector hardware with multi-tasking software.
More info available in X-Act Brochure